Microstructure behavior in the tribological performance of abrasive manufacturing processes for microelectronic devices

We seek to obtain an undergraduate researcher to perform chemical mechanical polishing (CMP) experiments of wafers fabricated by the PhD student. Additionally, this student will assist the PhD student in performing orientation imaging microscopy (OIM) to determine the pre-process microstructural characteristics (grain distribution) using MRSEC instrumentation. Lastly, the student will conduct nano-mechanical characterization tests on the pre- and post-CMP wafers using a state-of-the-art nanoindenter located in Prof. Higgs laboratory.

 

Projects  |   Schedule   |   Seminar   |   Social Activities   |   Application   |   REU Home


© 2007 CMU REU. All Rights Reserved